The Lehighton-2000RS is a high-throughput, non-contact metrology system designed for precise sheet resistance characterization of compound semiconductor wafers. Ideal for advanced R&D and production environments, it supports a wide range of materials, delivering reliable and reproducible results with flexible automation options.
• The Lehighton uses non-contact Eddy probe head in order to determine sheet resistance with high precision.
• Double side non-contact measurement
• AC driven coils
• Double coil design for reducing distance-dependence
• Triple Eddy probe head for wide range of sheet resistance
• Semi-automated platform with a small footprint
• Ideal for resistance measurements on various material
• With a special focus or compound semiconductors: GaN/AlGaN, GaAs, InP, InAs, InGaAs, Graphene, SiC;
• Sample size: 3-8”
