2008
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Meeting Abstracts - The Electrochemical Society

Application of Micro Corona-Kelvin Technique to Non-contact Monitoring of High-k MOS Capacitors

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Abstract

Topic

Corona-Kelvin Metrology, Dielectrics, Non-Contact Measurement

Author

Anton Belyaev, Marshall Wilson, Jacek Lagowski, Lubek Jastrzebski, Andrew Findlay, J Price, CS Park, Muhammad M Hussain, G Bersuker, PS Lysaght
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