1999
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ASTM Conference on Gate Dielectric Oxide Integrity, 1999

COCOS (Corona Oxide Characterization of Semiconductor) Metrology: Physical Principles and Applications

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Abstract

Topic

COCOS, corona, Interface Trap, stress induced leakage current, iron contamination, Contact Potential Difference (CPD)

Author

M. Wilson, J. Lagowski, A. Savtchouk, L. Jastrzebski, J. D'Amico
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