1999

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Cleaning Technology in Semiconductor Device Manufacturing, Proceedings of the Sixth International Symposium Oct.1999), Vol. 99-36, pages 59-68

Evaluation of Advanced Pre-Gate Cleanings

Abstract

pre-gate cleaning, particle removal, metal removal, surface microroughness, surface passivation

C. Cowache, P. Boelen, I. Kashkoush, P Besson, F. Tardif

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