2018
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ASMC 2018 Annual Conference

Micro-Photoluminescence Imaging of Dislocation Generation in 0.18 μm Power Semiconductor Devices with Deep Trenches

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Abstract

Topic

Micro-Photoluminescence Imaging, Dislocation Generation, Semiconductor Devices, Deep Trenches, Wafer Fabrication

Author

L. Jastrzebski, G. Nadudvari, D. T. Cseh, L. Roszol, G. Molnar, I. Lajtos
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