1995
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Fourth International Symposium on Cleaning Technology in Semiconductor Device, 1995

Monitoring of Fe Contamination on Si Surfaces Using Non-Contact Surface Charge Profiler

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Abstract

Topic

Surface Charge Profiler (SCP), Fe concentration, Si surfaces, Non-Contact Measurement

Author

P. Roman, I. Kashkoush, R.E. Novak, E. Kamieniecki, J. Ruzyllo
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