2001
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Microelectronics Reliability 41 2001) 1403

Non Contact Surface Potential Measurements for Charging Reduction During Manufacturing of Metal-Insulator-Metal Capacitors

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Abstract

Topic

charging induced damage (CID), metal-insulator-metal-capacitor (MIMC)

Author

J. Ackaert, Z. Wang, E. De Backer, P. Colson, P. Coppens
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