We have made non-contact thickness and electrical measurements on BST/Pt samples. We believe this is the first time that the BST thickness on top of a Pt electrode has been measured with high confidence. The thickness measurements were made using picosecond ultrasonics and could be correlated to TEM at certain points. In contrast to this destructive method, however, picosecond ultrasonics allowed fast measurements, determined film uniformity through 49-point contour maps, and simultaneously calculated the Pt thickness. The electrical measurements were made using a capacitance probe with COCOS-based (corona oxide characterization of semiconductors) technology. From the electrical measurements we were able to calculate the dielectric constant.
